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four point probe systems

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Products

300 SERIES FOUR-POINT PROBES

Features:  Automated Sheet Resistivity Meter 1 mhm / square to 800 khm / square extended range up compensation option up to to 8" wafer capability or 156mm x 156mm including aluminum, steel, and titanium.

520 Four-Point Probe Series

Features: Automated Sheet Resistivity Meter, Number of Measurement Sites: 1~9 or customzed up to 192, Single Measurement Range: 20 Ohm/sq to 400 Ohm/sq, Multiple Measurement Range: 2E-2 Ohm/sq to 4E+9 Ohm/sq, Size Accommodated (mm): 156x156 to 220x220, or customized


280/680I Dynamic Four-Point Probe

280/680I Dynamic Four-Point Probe

Automated Sheet Resistivity Meter for III-V compound materials, dynamic AC waveform to overcome contact resistance problems, five point measurement available, 10 mOhm / square to 40 kOhm / square, up to to 8" wafer capability

Automap Software

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Features


  • Cartesian or polar maps with measurements up to more than 600 sites
  • Full or partial wafer mapping
  • Color 2D contour and 3D mapping
  • 1, 5, 9 points measurement arrays, diameter scans, and ASTM/SEMI X-patterns
  • Customer-specified measurement sites up to 5000 points
  • Round or rectangular test patterns
  • Thickness correction
  • Edge correction
  • Temperature correction (optional)
  • Measurement units: sheet resistance W/sq, resistivity W-cm, resistance V/I, thickness t(µ), thickness t(Å)
  • Easy unit conversion
  • Librarian data storage
  • P-N type detection
  • Repeatability testing
  • Data export to ASCII files or Microsoft Excel
  • Remote data access via LAN
  • Diagnostics
  • Selectable security levels user
  • Runs on Microsoft Windows 10
  • Statistical process control (SPC) option
  • Check whether a process is within control limits using X-Bar/R charts and histograms
  • SECS-II optional

  • C-V/I-V C-V MAP SERIES
  • Four-Point Probes

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