Other Accessories
Temperature Chamber:
- Temperature chamber to keep wafer surface at controlled temperature for Curie temperature measurement
- Y-Theta movement
Hot chuck:
- Designed for mobile ion detection
- Room temperature to 250 C
- Heating and cooling controlled by CVmap software
Accessories for Mercury Probe CVmap Systems
probe station:
- Designed for use with ferro-electric materials
- Setup for 0 to 1MHz C-V and P-E plotting with CV Map 92B computer
- Motor driven precision X-Y-Theta with 10 micron resolution
- Gold plated 8" chuck for maintaining low contact resistance to the wafer backside, with vacuum for wafer holding
- Stereo microscope, LCD camera viewers, and light source
- Monitor for displaying LCD camera view
- Probe up-down hand controlled lever with adjustable down probing limit
- Enclosure with easy to handle cover for keeping out interference
