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Mercury Probe Selection Guide

Type Dot area Application
Large area > thick oxides
failure analysis tbd  
Standard ~ 0.015 cm2 low k materials, thin oxide  
Small < 5E-4 cm2 leaky materials
intrinsic oxide properties
ultra thin oxide  
High Voltage variable
usually small
for breakdown measurements of thick oxides  
High frequency variable for C-V measurements up to 10 MHz  
Ring / dot variable insulating substrates
compound semiconductors
high resistivity materials  
ULTEM   small edge exclusion  
Polycarbonate   standard with integrated light source 
Four Point Probe   sheet resistance measuremets with Models
CVRmap 3093A/B and M4PP3093
Custom   Customized probe geometries