Automap Software

Features:

• Cartesian or polar maps with measurements up to more than 600 sites
• full or partial wafer mapping
• color 2D contour and 3D mapping
• 1, 5, 9 points measurement arrays, diameter scans, and ASTM/SEMI X-patterns
• customer specified measurement sites up to 5000 points
• round or rectangular test patterns
• thickness correction
• edge correction
• temperature correction (optional)
• measurement units: sheet resistance W/sq, resistivity W-cm, resistance V/I, thickness t(µ), thickness t(Å)
• easy unit conversion
• librarian data storage
• p-n type detection
• repeatability testing
• data export to ASCII files or Microsoft Excel
• remote data access via LAN
• diagnostics
• selectable security levels user
• runs on Microsoft Windows 10
• statistical process control (SPC) option
• check whether a process is within control limits using X-Bar/R charts and histograms
• SECS-II optional