1100SI Series, Far reaching Four-Point probes

Features:

• Automated Sheet Resistivity Meter
• with x-y stage for flat panel application (G1, G2, G4, G4.5, G5)
• customized sizes available
• 1 mOhm / square to 800 kOhm / square
• extended range up to 8x1011W/sq
• Automap software package
• SECS-II communication available

Facility requirements:

• Power: 100 / 115 / 230 VAC, 50/60Hz, 200 W
• Vacuum 20 in. Hg
• Footprint: varies with panel size

Brochure Basic SpecsProbe Head Selection Guide