333AC/AF Four-Point Probe
333AC/AF Cassette to Cassette Four-Point Probe
Features:
- Cassette to Cassette version of Model 333A
- 8" (optional) and 12" wafer capability
- Cassette to cassette with small foot print
- Open cassette: Model 333AC
- FOUP capability: Model 333AF
- Automap software package
- SECS-II communication available
- Edge defect tolerant automatic wafer alignment available
- Automatic probe-head switching available
Facility requirements:
- Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
- Vacuum 20 in. Hg
- Footprint 333A (depth, width, height cover closed/open): 36" x 20" x 18"/35" (91.5 cm, 51cm, 46cm89cm) plus room for desktop computer, monitor, printer, keyboard, mouse.
