280I Series Four-Point Probes

    Features:

      • Automated Sheet Resistivity Meter
      • 1 mOhm / square to 800 kOhm / square
      • extended range up to 8x1011W/sq
      • temperature compensation option
      • up to to 8" wafer capability or 156mm x 156mm
      • stand alone systems and PC controlled systems with Automap software package

      Facility requirements:

      • Power: 100 / 115 / 230 VAC, 50/60Hz, 200 W
      • Vacuum 20 in. Hg
      • Table Footprint (depth, width, height): 22" x 20 " x 14.5" (55.9 cm, 50.8 cm, 36.8 cm)

       

      Brochure Basic Specs

      Probe Head Selection Guide

280I Series Desktop Four-Point Probes

Model Feature Display

280 PI

  • automatic 1, 5, and 9 site measurement
  • printout on 2 1/4" tape

280 PCI

  • small external computer keypad for user defined measurement programs
  • unit display in Ohm / sq., V/I, Ohm-cm
  • calculates standard deviation
280 SI  
280 TSI
  • Temperature compensation
 
280 TCI
  • Statistical Process Control (SPC)
 
280 DI
  • extended measurement range up to 8E11 Ohm / sq.

280 HCI
  • hot chuck and high temperature chamber
  • room temperature to 100 C with 0.5 C temperature uniformity
  • measurement range up to 8E5 Ohm / sq.