233AC Cassette to Cassette Four-Point Probe

Features:

• cassette to cassette version of 280 Series
• small foot print
• C2C handling without robot
• edge defect tolerant automatic wafer alignment
• 1 mOhm/square to 800 kOhm / square
• extended range up to 8E11 W/sq
• up to to 8" wafer capability
• Automap software package
• SECS-II communication available

Facility requirements:

• Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
• Vacuum 20 in. Hg
• Footprint (depth, width, height): 24" x 41.5" x 65" ( 60cm, 105.5cm, 164.5cm)

Brochure Basic Specs

Probe Head Selection Guide