Model 333A Four-Point Probe for 300mm

Features:

• Automated Sheet Resistivity Meter
• 1 mOhm / square to 800 kOhm / square
• extended range up to 8E11 W/sq
• up to to 12" wafer capability
• Automap software package
• SECS-II communication available
• Automatic probe-head switching available

Facility requirements:

• Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
• Vacuum 20 in. Hg
• Footprint 333A (depth, width, height cover closed/open): 36" x 20" x 18"/35" (91.5 cm, 51cm, 46cm89cm) plus room for desktop computer, monitor, printer, keyboard, mouse.

Brochure Basic Specs Probe Head Selection Guide